{"title":"自旋掺杂剂在快速恢复外延二极管加工中的寿命修饰源","authors":"A. Véron, M. Ohanisian, D. Ciocea, C. Mitroi","doi":"10.1109/SMICND.1997.651585","DOIUrl":null,"url":null,"abstract":"The paper presents the results of an experimental study dedicated to lifetime control in fast recovery epitaxial diodes (FRED) by gold and platinum diffusion from spin-on sources. The main diode parameters, namely reverse recovery time, forward voltage drop and leakage current (especially at high temperatures) are comparatively analyzed. It is shown that platinum and gold offer a different trade-off between these parameters. The final choice of the lifetime modifier is determined by the intended diodes applications.","PeriodicalId":144314,"journal":{"name":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Spin-on dopants as lifetime modifier sources in fast recovery epitaxial diodes processing\",\"authors\":\"A. Véron, M. Ohanisian, D. Ciocea, C. Mitroi\",\"doi\":\"10.1109/SMICND.1997.651585\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents the results of an experimental study dedicated to lifetime control in fast recovery epitaxial diodes (FRED) by gold and platinum diffusion from spin-on sources. The main diode parameters, namely reverse recovery time, forward voltage drop and leakage current (especially at high temperatures) are comparatively analyzed. It is shown that platinum and gold offer a different trade-off between these parameters. The final choice of the lifetime modifier is determined by the intended diodes applications.\",\"PeriodicalId\":144314,\"journal\":{\"name\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1997.651585\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1997.651585","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Spin-on dopants as lifetime modifier sources in fast recovery epitaxial diodes processing
The paper presents the results of an experimental study dedicated to lifetime control in fast recovery epitaxial diodes (FRED) by gold and platinum diffusion from spin-on sources. The main diode parameters, namely reverse recovery time, forward voltage drop and leakage current (especially at high temperatures) are comparatively analyzed. It is shown that platinum and gold offer a different trade-off between these parameters. The final choice of the lifetime modifier is determined by the intended diodes applications.