{"title":"利用两相液相技术的球透镜的形成与集成","authors":"Chih-Chun Lee, S. Hsiao, W. Fang","doi":"10.1109/MEMSYS.2009.4805346","DOIUrl":null,"url":null,"abstract":"This study presents a novel microlens formation technology to implement a polymer ball lens in liquid medium. The highly symmetric ball lens is achieved due to the lower gravity influence in liquid. The microlens' diameter is controlled by the volume of the dispensed polymer. Moreover, it is easy to dispense, form, and align the liquid-phase polymer microlens with MEMS structures while processing in liquid. Thus, the microlens can either be a discrete optical component, or directly integrated with MEMS structures during the process to form a SiOB (silicon-optical-bench). To date, ball lenses with diameter ranging 200¿m~600¿m and surface roughness ≪10nm are fabricated. A typical sphericity is 8.6¿m for a 525¿m diameter ball lens. The integration of such polymer micro ball lens on SiOB is also demonstrated.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Formation and Integration of a Ball Lens Utilizing Two Phase Liquid Technology\",\"authors\":\"Chih-Chun Lee, S. Hsiao, W. Fang\",\"doi\":\"10.1109/MEMSYS.2009.4805346\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This study presents a novel microlens formation technology to implement a polymer ball lens in liquid medium. The highly symmetric ball lens is achieved due to the lower gravity influence in liquid. The microlens' diameter is controlled by the volume of the dispensed polymer. Moreover, it is easy to dispense, form, and align the liquid-phase polymer microlens with MEMS structures while processing in liquid. Thus, the microlens can either be a discrete optical component, or directly integrated with MEMS structures during the process to form a SiOB (silicon-optical-bench). To date, ball lenses with diameter ranging 200¿m~600¿m and surface roughness ≪10nm are fabricated. A typical sphericity is 8.6¿m for a 525¿m diameter ball lens. The integration of such polymer micro ball lens on SiOB is also demonstrated.\",\"PeriodicalId\":187850,\"journal\":{\"name\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2009.4805346\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805346","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Formation and Integration of a Ball Lens Utilizing Two Phase Liquid Technology
This study presents a novel microlens formation technology to implement a polymer ball lens in liquid medium. The highly symmetric ball lens is achieved due to the lower gravity influence in liquid. The microlens' diameter is controlled by the volume of the dispensed polymer. Moreover, it is easy to dispense, form, and align the liquid-phase polymer microlens with MEMS structures while processing in liquid. Thus, the microlens can either be a discrete optical component, or directly integrated with MEMS structures during the process to form a SiOB (silicon-optical-bench). To date, ball lenses with diameter ranging 200¿m~600¿m and surface roughness ≪10nm are fabricated. A typical sphericity is 8.6¿m for a 525¿m diameter ball lens. The integration of such polymer micro ball lens on SiOB is also demonstrated.
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