纳米结构非晶石墨与碳纳米管混合薄膜的场发射特性

Zhanling Lu, Binglin Zhang, N. Yao, Xinyue Zhang, Bingxian Ma, Zhiqin Fan
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引用次数: 1

摘要

采用微波等离子体化学气相沉积(MPCVD)技术在钛涂层陶瓷衬底上制备了纳米结构石墨和碳纳米管的混合薄膜。气源为H/sub - 2/和CH/sub - 4/的混合物,流量分别为100 sccm和12 sccm。沉积过程中,总压为6.0 KPa,衬底温度为850/spl℃,微波功率为1500W,保温2小时。利用场发射扫描电镜、x射线衍射、拉曼散射光谱和x射线光电子能谱对膜的表面形貌和纳米结构进行了表征。薄膜的场致发射在基压低于5/spl倍/10/sup -5/Pa的真空室中进行。初始导通场为0.6V//spl mu/m,在1.7 V//spl mu/m下获得1.7 mA/cm/sup 2/的电流密度。将电场维持在1.8 V//spl mu/m,测试了发射的稳定性。实验表明,该薄膜是一种高效、稳定的低电场阴极材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emission characteristics of mixture films of nano-structure amorphous graphite and carbon nanotubes
The mixture film of nano-structure graphite and carbon nanotubes was fabricated on titanium coated ceramic substrate by microwave plasma chemical vapor deposition system (MPCVD). The source gas was a mixture of H/sub 2/ and CH/sub 4/ with flow rates of 100 sccm and 12 sccm, respectively. During the deposition, the total pressure of 6.0 KPa, substrate temperature of 850/spl deg/C and microwave power of 1500W were kept for 2 hours. The surface morphology and the nano-structure of the film were examined using field emission scanning electron microscopy, X-ray diffraction, Raman scattering spectroscopy and X-ray photoelectron spectroscopy. Field emission of the film were carried out in a vacuum chamber with base pressure of below 5/spl times/10/sup -5/Pa. The initial turn-on field was 0.6V//spl mu/m and 1.7 mA/cm/sup 2/ of current density at 1.7 V//spl mu/m was obtained. The stability of the emission was tested by maintaining the electric field at 1.8 V//spl mu/m. The experiments indicate that the film is an efficient and stable cathode material at low electric field.
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