Zhanling Lu, Binglin Zhang, N. Yao, Xinyue Zhang, Bingxian Ma, Zhiqin Fan
{"title":"纳米结构非晶石墨与碳纳米管混合薄膜的场发射特性","authors":"Zhanling Lu, Binglin Zhang, N. Yao, Xinyue Zhang, Bingxian Ma, Zhiqin Fan","doi":"10.1109/IVESC.2004.1414242","DOIUrl":null,"url":null,"abstract":"The mixture film of nano-structure graphite and carbon nanotubes was fabricated on titanium coated ceramic substrate by microwave plasma chemical vapor deposition system (MPCVD). The source gas was a mixture of H/sub 2/ and CH/sub 4/ with flow rates of 100 sccm and 12 sccm, respectively. During the deposition, the total pressure of 6.0 KPa, substrate temperature of 850/spl deg/C and microwave power of 1500W were kept for 2 hours. The surface morphology and the nano-structure of the film were examined using field emission scanning electron microscopy, X-ray diffraction, Raman scattering spectroscopy and X-ray photoelectron spectroscopy. Field emission of the film were carried out in a vacuum chamber with base pressure of below 5/spl times/10/sup -5/Pa. The initial turn-on field was 0.6V//spl mu/m and 1.7 mA/cm/sup 2/ of current density at 1.7 V//spl mu/m was obtained. The stability of the emission was tested by maintaining the electric field at 1.8 V//spl mu/m. The experiments indicate that the film is an efficient and stable cathode material at low electric field.","PeriodicalId":340787,"journal":{"name":"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Field emission characteristics of mixture films of nano-structure amorphous graphite and carbon nanotubes\",\"authors\":\"Zhanling Lu, Binglin Zhang, N. Yao, Xinyue Zhang, Bingxian Ma, Zhiqin Fan\",\"doi\":\"10.1109/IVESC.2004.1414242\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The mixture film of nano-structure graphite and carbon nanotubes was fabricated on titanium coated ceramic substrate by microwave plasma chemical vapor deposition system (MPCVD). The source gas was a mixture of H/sub 2/ and CH/sub 4/ with flow rates of 100 sccm and 12 sccm, respectively. During the deposition, the total pressure of 6.0 KPa, substrate temperature of 850/spl deg/C and microwave power of 1500W were kept for 2 hours. The surface morphology and the nano-structure of the film were examined using field emission scanning electron microscopy, X-ray diffraction, Raman scattering spectroscopy and X-ray photoelectron spectroscopy. Field emission of the film were carried out in a vacuum chamber with base pressure of below 5/spl times/10/sup -5/Pa. The initial turn-on field was 0.6V//spl mu/m and 1.7 mA/cm/sup 2/ of current density at 1.7 V//spl mu/m was obtained. The stability of the emission was tested by maintaining the electric field at 1.8 V//spl mu/m. The experiments indicate that the film is an efficient and stable cathode material at low electric field.\",\"PeriodicalId\":340787,\"journal\":{\"name\":\"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)\",\"volume\":\"64 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVESC.2004.1414242\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVESC.2004.1414242","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Field emission characteristics of mixture films of nano-structure amorphous graphite and carbon nanotubes
The mixture film of nano-structure graphite and carbon nanotubes was fabricated on titanium coated ceramic substrate by microwave plasma chemical vapor deposition system (MPCVD). The source gas was a mixture of H/sub 2/ and CH/sub 4/ with flow rates of 100 sccm and 12 sccm, respectively. During the deposition, the total pressure of 6.0 KPa, substrate temperature of 850/spl deg/C and microwave power of 1500W were kept for 2 hours. The surface morphology and the nano-structure of the film were examined using field emission scanning electron microscopy, X-ray diffraction, Raman scattering spectroscopy and X-ray photoelectron spectroscopy. Field emission of the film were carried out in a vacuum chamber with base pressure of below 5/spl times/10/sup -5/Pa. The initial turn-on field was 0.6V//spl mu/m and 1.7 mA/cm/sup 2/ of current density at 1.7 V//spl mu/m was obtained. The stability of the emission was tested by maintaining the electric field at 1.8 V//spl mu/m. The experiments indicate that the film is an efficient and stable cathode material at low electric field.