300mm晶圆厂采用间隔/间隔发散和收敛IMP方法进行低成本和短交货期的AMHS设计

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993614

R. Kurosaki, T. Shimura, H. Komada, T. Kojima, Y. Watanabe

{"title":"300mm晶圆厂采用间隔/间隔发散和收敛IMP方法进行低成本和短交货期的AMHS设计","authors":"R. Kurosaki, T. Shimura, H. Komada, T. Kojima, Y. Watanabe","doi":"10.1109/ISSM.2000.993614","DOIUrl":null,"url":null,"abstract":"A 300 mm generation automatic transport system, transport system with the \"interbay and intrabay diverging and converging method\" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab\",\"authors\":\"R. Kurosaki, T. Shimura, H. Komada, T. Kojima, Y. Watanabe\",\"doi\":\"10.1109/ISSM.2000.993614\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A 300 mm generation automatic transport system, transport system with the \\\"interbay and intrabay diverging and converging method\\\" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.\",\"PeriodicalId\":104122,\"journal\":{\"name\":\"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2000.993614\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993614","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 12

摘要

提出了一种采用OHT技术的300mm代自动输送系统，该输送系统采用“舱间和舱内分流和汇聚法”(即分流/汇聚法)。然而，由于该方法需要较大的系统规模，因此需要非常复杂的控制，因此其实际应用一直受到阻碍。我们制定了将两个或两个以上的发散/汇聚系统组合起来，并通过股票进行连接的方案。仿真结果表明，采用该方法可以构建更短的交货期和低成本的运输系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab

A 300 mm generation automatic transport system, transport system with the "interbay and intrabay diverging and converging method" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

自引率

0.00%

发文量