多孔硅粉的形貌和内部结构取决于后处理的条件

2016 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW) Pub Date : 2016-02-01 DOI:10.1109/EICONRUSNW.2016.7448108

A. Belorus, K. Bespalova, Y. Spivak

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引用次数: 13

摘要

采用电化学阳极腐蚀法制备了多孔硅纳米颗粒。用扫描电镜研究了多孔硅粉的形貌和内部结构。讨论了后处理工艺条件对形貌和内部结构的影响。

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Morphology and internal structure of porous silicon powders in dependence on the conditions of post-processing

Nanoparticles of porous silicon were obtained by electrochemical anodic etching. Morphology and internal structure of porous silicon powders were investigated by scanning electron microscopy. The influence of technological conditions of post-processing on morphology and internal structure is discussed.

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来源期刊

2016 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW)

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