{"title":"半导体器件和材料的热分析-为什么我不应该相信热模拟?","authors":"M. Kuball, J. Pomeroy, F. Gucmann, Bahar Oner","doi":"10.1109/BCICTS45179.2019.8972763","DOIUrl":null,"url":null,"abstract":"Semiconductor device temperature is challenging to measure; often IR thermography or electrical measurements are used which do not have a high enough spatial resolution for most of the current semiconductor technology to detect sub-micron size hot spots. Thermal simulation is often therefore used to predict peak device temperature. Limitations of thermal simulations are highlighted. Latest developments in the actual measurement of semiconductor device temperature with sub-micron spatial resolution including Raman Thermography, High Spatial Resolution Hyperspectral Quantum Rod Thermal Imaging, Thermal Atomic Force Microscopy, and thermoreflectance are detailed, which enable validation of thermal simulations.","PeriodicalId":243314,"journal":{"name":"2019 IEEE BiCMOS and Compound semiconductor Integrated Circuits and Technology Symposium (BCICTS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Thermal analysis of semiconductor devices and materials - Why should I not trust a thermal simulation ?\",\"authors\":\"M. Kuball, J. Pomeroy, F. Gucmann, Bahar Oner\",\"doi\":\"10.1109/BCICTS45179.2019.8972763\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Semiconductor device temperature is challenging to measure; often IR thermography or electrical measurements are used which do not have a high enough spatial resolution for most of the current semiconductor technology to detect sub-micron size hot spots. Thermal simulation is often therefore used to predict peak device temperature. Limitations of thermal simulations are highlighted. Latest developments in the actual measurement of semiconductor device temperature with sub-micron spatial resolution including Raman Thermography, High Spatial Resolution Hyperspectral Quantum Rod Thermal Imaging, Thermal Atomic Force Microscopy, and thermoreflectance are detailed, which enable validation of thermal simulations.\",\"PeriodicalId\":243314,\"journal\":{\"name\":\"2019 IEEE BiCMOS and Compound semiconductor Integrated Circuits and Technology Symposium (BCICTS)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE BiCMOS and Compound semiconductor Integrated Circuits and Technology Symposium (BCICTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/BCICTS45179.2019.8972763\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE BiCMOS and Compound semiconductor Integrated Circuits and Technology Symposium (BCICTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BCICTS45179.2019.8972763","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thermal analysis of semiconductor devices and materials - Why should I not trust a thermal simulation ?
Semiconductor device temperature is challenging to measure; often IR thermography or electrical measurements are used which do not have a high enough spatial resolution for most of the current semiconductor technology to detect sub-micron size hot spots. Thermal simulation is often therefore used to predict peak device temperature. Limitations of thermal simulations are highlighted. Latest developments in the actual measurement of semiconductor device temperature with sub-micron spatial resolution including Raman Thermography, High Spatial Resolution Hyperspectral Quantum Rod Thermal Imaging, Thermal Atomic Force Microscopy, and thermoreflectance are detailed, which enable validation of thermal simulations.