不同温度下铝和铜薄膜的加速振动疲劳试验

2018 7th Electronic System-Integration Technology Conference (ESTC) Pub Date : 2018-09-01 DOI:10.1109/ESTC.2018.8546488

V. Osipova, B. Wunderle, J. Arnold, J. Heilmann, T. Mahanta

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引用次数: 5

摘要

本文综述了关于金属薄膜疲劳的大量文献综述。此外，我们还描述了我们定制的悬臂状反射基板上薄膜的等温机械循环装置。该装置用于频率范围为10hz至1000hz的共振测试，并允许通过样品刚度的变化来检测故障。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Accelerated Vibrational Fatigue Testing of Thin Aluminum and Copper Films at Different Temperatures

In this paper we summarize extensive literature review on the fatigue of thin metal films. Additionally we describe our custom-made set-up for isothermal mechanical cycling of thin films on cantilever-like reflective substrates. The device is made for in-resonance testing in the frequency ranges from 10 Hz to 1000 Hz and allows detection of failure by shift in stiffness of the sample.

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2018 7th Electronic System-Integration Technology Conference (ESTC)

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