{"title":"系统的MEMS ASIC设计流程用一个加速度传感器为例","authors":"Jenny Klaus, R. Paris, R. Sommer","doi":"10.1109/SMACD.2016.7520730","DOIUrl":null,"url":null,"abstract":"With the help of MEMS-ASIC-development methodology the gap between a seamless design of multiphysical systems can be overcome. This contribution gives insight to MEMS2015 results of methodology for synthesis of MEMS. As an example of heterogeneous design an acceleration sensor is presented.","PeriodicalId":441203,"journal":{"name":"2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Systematic MEMS ASIC design flow using the example of an acceleration sensor\",\"authors\":\"Jenny Klaus, R. Paris, R. Sommer\",\"doi\":\"10.1109/SMACD.2016.7520730\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"With the help of MEMS-ASIC-development methodology the gap between a seamless design of multiphysical systems can be overcome. This contribution gives insight to MEMS2015 results of methodology for synthesis of MEMS. As an example of heterogeneous design an acceleration sensor is presented.\",\"PeriodicalId\":441203,\"journal\":{\"name\":\"2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)\",\"volume\":\"80 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-06-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMACD.2016.7520730\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMACD.2016.7520730","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Systematic MEMS ASIC design flow using the example of an acceleration sensor
With the help of MEMS-ASIC-development methodology the gap between a seamless design of multiphysical systems can be overcome. This contribution gives insight to MEMS2015 results of methodology for synthesis of MEMS. As an example of heterogeneous design an acceleration sensor is presented.