掺杂铂和锑的SnO/ sub2 /溶胶-凝胶衍生膜

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings Pub Date : 1997-10-07 DOI:10.1109/SMICND.1997.651591

C. Savaniu, A. Arnautu, C. Cobianu, M. Zaharescu, C. Parlog, A. van den Berg

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引用次数: 0

摘要

首次获得并报道了同时掺杂铂和锑的SnO/sub /溶胶-凝胶衍生薄膜。在硅或多孔硅(PS)衬底上，锑掺杂量为(0-2)% M，而铂的添加量限制在最大1% M，可获得透明、无裂纹的镀层。

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SnO/sub 2/ sol-gel derived films doped with platinum and antimony

SnO/sub 2/ sol-gel derived thin films doped simultaneously with platinum and antimony are obtained and reported for the first time. Transparent, crack-free layers, deposited on silicon or porous silicon (PS) substrates were obtained with antimony doping in the range (0-2)% M, while the platinum addition was limited to maximum 1% M.

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1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings

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