{"title":"高可靠的静电执行器,采用光刻胶溶剂回流制成的圆角电极","authors":"S. Yee, R. L. Peterson, L. Bernal, K. Najafi","doi":"10.1109/TRANSDUCERS.2013.6627093","DOIUrl":null,"url":null,"abstract":"This paper describes a simple 3-mask fabrication process to construct a highly-reliable, large deflection (> 8 μm) and high frequency (> 90 kHz) electrostatic (ES) actuator. The ES actuator consists of a high residual stress dielectric diaphragm and an electroplated nickel electrode separated by an electrostatic air gap defined by sacrificial photoresist (PR). Actuators with filleted electrodes were created using solvent reflow of sacrificial photoresist. The process has moderately high yield of greater than 64%. The filleted electrode enables the actuator to be continuously actuated for more than 43 days without any diaphragm breakage or stiction.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Highly-reliable electrostatic actuator using filleted electrode made with photoresist solvent reflow\",\"authors\":\"S. Yee, R. L. Peterson, L. Bernal, K. Najafi\",\"doi\":\"10.1109/TRANSDUCERS.2013.6627093\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes a simple 3-mask fabrication process to construct a highly-reliable, large deflection (> 8 μm) and high frequency (> 90 kHz) electrostatic (ES) actuator. The ES actuator consists of a high residual stress dielectric diaphragm and an electroplated nickel electrode separated by an electrostatic air gap defined by sacrificial photoresist (PR). Actuators with filleted electrodes were created using solvent reflow of sacrificial photoresist. The process has moderately high yield of greater than 64%. The filleted electrode enables the actuator to be continuously actuated for more than 43 days without any diaphragm breakage or stiction.\",\"PeriodicalId\":202479,\"journal\":{\"name\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2013.6627093\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6627093","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Highly-reliable electrostatic actuator using filleted electrode made with photoresist solvent reflow
This paper describes a simple 3-mask fabrication process to construct a highly-reliable, large deflection (> 8 μm) and high frequency (> 90 kHz) electrostatic (ES) actuator. The ES actuator consists of a high residual stress dielectric diaphragm and an electroplated nickel electrode separated by an electrostatic air gap defined by sacrificial photoresist (PR). Actuators with filleted electrodes were created using solvent reflow of sacrificial photoresist. The process has moderately high yield of greater than 64%. The filleted electrode enables the actuator to be continuously actuated for more than 43 days without any diaphragm breakage or stiction.