带压阻式焦距和角度传感器的变焦扫描仪的研制

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051506

K. Nakazawa, Takashi Sasaki, H. Furuta, J. Kamiya, Hideki Sasaki, K. Hane

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引用次数: 0

摘要

我们提出了变焦扫描仪结合压敏电阻来监测旋转角度和焦距。角度传感器在±1.2度范围内测量精度为±0.021度。

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Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor

We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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