cmos IC逻辑门开路电路的性能及测试意义

C. Henderson, J. Soden, C. Hawkins
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引用次数: 94

摘要

测量了几种逻辑门开路缺陷结构的电学性能和测试性能。结果表明,隧道电流通过精细的几何不连续点可以实现集成电路的低频工作。相邻金属互连或栅极互连上的大金属开口没有观察到显著的电容耦合。这些结果表明,在测试过程中需要采用不同的开路缺陷检测方法。结构化测试方法要求对导致失败的缺陷有透彻的了解。本研究提出了一种常见CMOS IC缺陷的电特性数据,即逻辑门的输入开路。不考虑个别晶体管栅极端子的开路。数据显示,窄互连不连续的逻辑门输入开路缺陷允许从直流到MHz区域频率的电路功能。证据支持电子隧穿作为电路功能的基本机制,在这种类型的缺陷存在。这表明,为了保证检测,应将开路逻辑门缺陷视为延迟故障。宽尺寸的开路缺陷没有信号耦合。数据还显示了静态电源电流(IDD)测试可以检测开路逻辑门输入的条件。在20世纪80年代后期,有两组人制造电路或用特定类型的开路测试现有电路[1,21]。其他人则研究了晶体管级开路现象,并提出了减少开路发生的设计变更[3,41]。结果表明,传统的卡滞测试方法无法检测出某些开路电路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
THE BEHAVIOR AND TESTING IMPLICATIONS OF CMOS IC LOGIC GATE OPEN CIRCUITS
The electrical and test properties of several logic gate open circuit defect structures were measured. Results indicate that tunneling current across fine geometry discontinuities enables low frequency operation of ICs. No significant capacitive coupling was observed for adjacent metal interconnect or for large metal opens on the gate interconnects. These results indicate the need for different methods of open circuit defect detection during test. I. Introduct ion Structured test methods require thorough knowledge of the defects that cause failure. This study presents data on the electrical characteristics of a common CMOS IC defect, an input open circuit to a logic gate. Individual transistor gate terminal opens are not considered. Data show that logic gate input open circuit defects for narrow interconnect discontinuities allow circuit functionality at frequencies from DC into the MHz region. Evidence supports electron tunneling as the basic mechanism for circuit functionality in the presence of this type of defect. This suggests that the open-circuited logic gate defect should be treated as a delay fault in order to guarantee detection. Open circuit defects with wide dimensions exhibited no signal coupling. Data also show the conditions under which quiescent power supply current (IDD,) tests can detect open circuit logic gate inputs. In the late 1980s two groups fabricated circuits or tested existing circuits with specific types of open circuits [l, 21. Others studied transistor-level open circuit phenomena and proposed design changes to reduce the occurrence of opens [3, 41. It was demonstrated that some open circuits are not detected by conventional stuck-at test methodologies.
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