{"title":"铝导体线路腐蚀","authors":"V. Bhide, J. M. Eldridge","doi":"10.1109/IRPS.1983.361960","DOIUrl":null,"url":null,"abstract":"Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Aluminum Conductor Line Corrosion\",\"authors\":\"V. Bhide, J. M. Eldridge\",\"doi\":\"10.1109/IRPS.1983.361960\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.\",\"PeriodicalId\":334813,\"journal\":{\"name\":\"21st International Reliability Physics Symposium\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1983-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"21st International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1983.361960\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"21st International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1983.361960","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.
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