Mariya Aleksandrova, G. Kolev, Y. Vucheva, I. Pandiev, K. Denishev
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It was found that PVDF based composite leads to improved interface conditions for electrode coating, such as low parasitic capacitances. The highest obtained piezoelectric voltage is ~ 586 mV at 40 g mass weight load with frequency of 50 Hz for gold coated GZO+PVDF. This voltage is 41% higher and more stable in the time sweep in comparison with the case at PVDF-free piezoelectric film, and 29% higher than the composite element, but with aluminum electrode. The interface capacitance is 3 orders of magnitude lower (nF vs µF) and the contact resistance is 15 times smaller (Ω vs kΩ) when the interfaces are with gold, which optimizes the electric energy collection and enhances the energy harvesting performance.","PeriodicalId":391606,"journal":{"name":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Flexible Oxide-Polymeric Composites for Piezoelectric Energy Harvesting\",\"authors\":\"Mariya Aleksandrova, G. Kolev, Y. Vucheva, I. Pandiev, K. Denishev\",\"doi\":\"10.1109/MIEL.2019.8889602\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study is presented technology for fabrication of a piezoelectric element as an alternative energy source (energy harvesting). 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引用次数: 0
摘要
在这项研究中,提出了压电元件作为替代能源(能量收集)的制造技术。这些元素是在柔性聚萘二甲酸乙二醇酯(PEN)衬底上生产的,由新型无铅纳米复合材料[ga掺杂ZnO (GZO) -聚偏氟乙烯(PVDF)]组成。氧化膜采用真空射频溅射沉积,PVDF采用喷涂系统粉碎。研究了铝和金金属涂层作为电极,对压电涂层产生的电能进行最佳提取。结果表明,PVDF喷射沉积使GZO膜的表面粗糙度降低了1.4%。在不同的动态载荷下,用两种类型的电极以及纯氧化物薄膜测量压电响应。发现PVDF基复合材料可以改善电极涂层的界面条件,如降低寄生电容。在50hz频率下,在40g质量重量载荷下,镀金的GZO+PVDF得到的压电电压最高为~ 586 mV。与无pvdf压电薄膜相比,该电压在时间扫描中提高了41%,并且更加稳定,比复合元件高29%,但有铝电极。当界面与金接触时,界面电容降低了3个数量级(nF vsµF),接触电阻降低了15倍(Ω vs kΩ),优化了电能收集,提高了能量收集性能。
Flexible Oxide-Polymeric Composites for Piezoelectric Energy Harvesting
In this study is presented technology for fabrication of a piezoelectric element as an alternative energy source (energy harvesting). The elements are produced on flexible polyethylene naphthalate (PEN) substrates and consist of novel lead-free nanocomposite [Ga-doped ZnO (GZO) - polyvinylidene fluoride (PVDF)]. The oxide film is deposited by vacuum radiofrequency (RF) sputtering and PVDF is pulverized by spray coating system. Aluminum and gold metal coatings are investigated as electrodes for optimal extraction of the generated electric energy from the piezoelectric coating. It was showed that PVDF spray deposition reduces the surface roughness of GZO film with 1.4 %. Piezoelectric response is measured at different applied dynamic loads with the two types of electrodes, as well as for oxide-only film. It was found that PVDF based composite leads to improved interface conditions for electrode coating, such as low parasitic capacitances. The highest obtained piezoelectric voltage is ~ 586 mV at 40 g mass weight load with frequency of 50 Hz for gold coated GZO+PVDF. This voltage is 41% higher and more stable in the time sweep in comparison with the case at PVDF-free piezoelectric film, and 29% higher than the composite element, but with aluminum electrode. The interface capacitance is 3 orders of magnitude lower (nF vs µF) and the contact resistance is 15 times smaller (Ω vs kΩ) when the interfaces are with gold, which optimizes the electric energy collection and enhances the energy harvesting performance.