预显影烘烤终点稳定与光- bcb聚合物

Proceedings. 4th International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces (Cat. No.98EX153) Pub Date : 1998-03-15 DOI:10.1109/ISAPM.1998.664439

D. Scheck, B. Rogers, P. Garrou, M. Dibbs, A. Strandjord, S. Cummings, Y. Ida

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引用次数: 3

摘要

在显影前使用烘烤可以稳定照相- bcb胶片的显影终点，并消除显影终点的时间依赖性。消除这种工艺变异性的来源使显影工艺的实施成为可能，在这种显影工艺中，对于给定的薄膜厚度和一组烘烤条件，最佳显影时间是恒定的，并且不需要对终点进行监控。

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Pre-develop bake for end point stabilization with photo-BCB polymers

The use of a bake prior to development stabilizes the develop end point of photo-BCB films and removes the time dependence of the develop end point. The elimination of this source of process variability enables the implementation of a develop process in which, for a given film thickness and set of bake conditions, the optimum develop time is a constant, and monitoring of the end point is unnecessary.

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Proceedings. 4th International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces (Cat. No.98EX153)

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