LIGA-MA-SPS工艺制备TiNi形状记忆合金微结构及陶瓷微模具

Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI:10.1109/MHS.2002.1058011

N. Miyano, H. Iwasa, M. Matsumoto, F. Kato, K. Ameyama, S. Sugiyama

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引用次数: 2

摘要

金属和陶瓷由于其机械和物理特性，在微系统再生和成型技术中变得越来越重要。在这项研究中，我们开发了一种使用LIGA模具的新工艺，该工艺能够在火花等离子烧结(SPS)机上铸造合金或陶瓷的微观结构。此外，合金采用机械合金化(MA)方法，使用不同金属粉末的组合。通过试验制备了Ti-Ni-Cu形状记忆合金粉末的微弹簧结构。最后，发现LIGA-MA-SPS工艺是一种有效的技术。

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Fabrication of TiNi shape memory alloy micro-structures and ceramic micro-mold by LIGA-MA-SPS process

Metals and ceramics are becoming increasing of importance to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In the study, we have developed a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using spark plasma sintering (SPS) machine. In addition, the alloys are made by mechanical alloying (MA) method using a combination of different metal powder. A micro spring structure of Ti-Ni-Cu shape memory alloy powder was produced by way of trial. Finally, it was found that the LIGA-MA-SPS process is an effective technique.

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Proceedings of 2002 International Symposium on Micromechatronics and Human Science

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