一种基于tsv的微探针阵列异构集成神经信号记录装置

Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) Pub Date : 2014-04-28 DOI:10.1109/VLSI-TSA.2014.6839692

Lei-Chun Chou, Shih-Wei Lee, Chuan-An Cheng, Po-Tsang Huang, Chih-Wei Chang, Cheng-Hao Chiang, Shang-Lin Wu, C. Chuang, J. Chiou, W. Hwang, Chung-Hsi Wu, Kuo-Hua Chen, C. Chiu, H. Tong, Kuan-Neng Chen

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引用次数: 0

摘要

高度集成和小型化的神经传感微系统是研究脑功能和实现神经假体的关键。提出了一种基于tsv的微探针阵列异构集成神经信号记录装置。通过TSV将微探头阵列和CMOS电路连接在芯片的两侧。通过对器件的电特性和TSV的测量结果，该记录装置已准备好用于生物医学应用。

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A TSV-based heterogeneous integrated neural-signal recording device with microprobe array

Highly integrated and miniaturized neural sensing microsystems are crucial for brain function investigation and neural prostheses realization. This paper presents a TSV-based heterogeneous integrated neural-signal recording device with microprobe array. By TSV, microprobe array and CMOS circuit make connection on the opposite sides of the chip. By measurement results on electrical characteristics of devices and TSV, this recording device is ready for bio-medical applications.

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Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)

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