倒装芯片和芯片级封装上热致应变的测量

D. Vogel, E. Kaulfersch, J. Simon, R. Kuhnert, A. Schubert, B. Michel
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引用次数: 11

摘要

作者开发并利用microDAC变形测量技术来确定热应力、FC和CSP截面试样的应变场。该方法允许人们解析微小结构内的应变场,例如焊料互连或导电粘合层。它是基于在不同物体负载状态下获得的数字化显微照片的比较。光学显微镜,扫描电镜和激光扫描显微镜用于图像捕获。本文给出了不同倒装芯片结构和芯片规模封装类型的互连中的应变分析结果,例如,在大多数倒装芯片情况下,下填充几乎完全抑制了向外凸起的整体剪切。此外,作为板材料的有机层压板中玻璃织物的局部外观会强烈影响凹凸变形。芯片级封装可靠性的一个主要要求是避免太大的热焊锡球应变,这将导致材料疲劳。采用刚性和柔性中间体的不同封装以不同的方式解决应力补偿问题。首先根据实验应变和翘曲测量结果对其中一些进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of thermally induced strains on flip chip and chip scale packages
The authors developed and made use of the microDAC deformation measurement technique to determine strain fields on thermally stressed, cross sectioned FC and CSP specimens. The method allows one to resolve strain fields inside tiny structures like e.g. solder interconnects or conductive adhesive layers. It is based on comparison of digitized micrographs obtained from different object load states. Optical, SEM and laser scanning microscopy are applied for image capture. The paper presents results of strain analysis in interconnects of different flip chip configurations and chip scale package types e.g., global shear of outward bumps is almost completely suppressed in most flip chip cases by underfilling. Furthermore, bump deformation can be strongly influenced by the local appearance of glass fabrics in organic laminates used as board materials. A main demand on chip scale package reliability is the avoidance of too large thermal solder ball strains, which lead to material fatigue. Different packages with rigid and flex interposers tackle the stress compensation problem in a different way. A first attempt is made to compare some of them based on experimental strain and warpage measurements.
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