光学非球面和自由曲面测量的最新进展

S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse
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引用次数: 4

摘要

介绍了两种测量球面和自由曲面的技术。第一种方法是倾斜波干涉仪,它是一种全孔径干涉测量方法,在测量过程中没有任何运动部件。第二种方法将光学单点传感器与两个平动轴和一个旋转轴结合使用。通过测量选定的非球面和特殊的自由曲面来比较这两种技术。讨论了两种测量原理之间的差异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Current developments on optical asphere and freeform metrology
Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.
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