用于光纤波分复用系统的微型硅制法布里-珀罗干涉仪

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148888

J. H. Jerman, D. Clift

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引用次数: 33

摘要

利用硅微加工技术制备了第二代近红外干涉仪。这些器件提供一个锐利的光传输峰值，可以用作光纤通信系统中的波分解复用器。反射镜元件的波长调谐和平行度控制是通过改变控制电极之间的电压来实现的。这第二代装置包括一个薄的，蚀刻停止波纹膜片作为可移动元件的悬挂。

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Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems

The techniques of silicon micromachining have been used to fabricate a second-generation Fabry-Perot interferometer for use in the near-infrared spectral region. These devices provide a sharp optical transmission peak which can be used as wavelength division demultiplexers in optical fiber communications systems. The wavelength tuning and parallelism control of the mirror elements are achieved electrostatically, by varying the voltage between control electrodes. This second-generation device includes a thin, etch-stopped corrugated diaphragm as the suspension for the movable element.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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