柔性薄膜PZT超声换能器

2018 76th Device Research Conference (DRC) Pub Date : 2018-06-01 DOI:10.1109/DRC.2018.8442177

Tianning Liu, Jeong Nyeon Kim, S. Trolier-McKinstry, T. Jackson

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引用次数: 3

摘要

我们最近报道了一种从高温生长衬底释放出大面积PZT $(\ mathm {Pb}(\ mathm {Zr}_{0.52}，\ mathm {i}_{0.48})_{0.98}\ mathm {O}_{3})$薄膜到几微米厚柔性聚酰亚胺衬底的转移工艺[1]。由于从刚性衬底上脱lamping，与生长薄膜相比，释放的薄膜具有优越的压电性能。在这项工作中，我们展示了用释放的PZT薄膜制造的超声波换能器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Flexible Thin-Film PZT Ultrasonic Transducers

We recently reported a transfer process that provides large area PZT $(\mathrm{Pb}(\mathrm{Zr}_{0.52},\mathrm{i}_{0.48})_{0.98}\mathrm{O}_{3})$ thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.

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来源期刊

2018 76th Device Research Conference (DRC)

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