非线程运行对运行控制中可控性矩阵秩的增加

T. Korabi, G. Graton, E. E. Adel, M. Ouladsine, J. Pinaton
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引用次数: 0

摘要

在半导体行业中,缩短周期和降低成本的杠杆之一是尽可能多地使用所有可用的生产工具。本文提出了一种改进的非线程运行对运行方法。这种方法允许同时控制尽可能多的设备。其思想是在一种新的状态空间表示(SSR)中用所有可能的组合(线程)对整个系统建模,以便我们可以增加可控性矩阵的秩。由于卡尔曼滤波器的效率,特别是在SSR中,卡尔曼滤波器被用作运行到运行控制的估计器。通过对意法半导体公司位于法国罗塞的铸造厂沉积区域的实测数据,验证了该方法的准确性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On the increase of the controllability matrix rank in non-threaded run-to-run control
One of the levers for cycle time and cost reduction in the semiconductor industry is the use of all the available production tools as much as possible. In this paper, a modified Non-threaded Run-to-Run approach is proposed. This approach permits the control of the maximum possible number of equipment simultaneously. The idea is to model the entire system with all possible combinations (threads) in a novel state space representation (SSR) so that we can increase the rank of the controllability matrix. Due to its efficiency, especially with a SSR, a Kalman filter is used as an estimator for the Run-to-Run control purpose. The accuracy of the proposed method is tested using real data derived from the deposition area of STMicroelectronics foundry in Rousset.
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