单机MEMS开关技术的固有可靠性表征

2016 IEEE International Integrated Reliability Workshop (IIRW) Pub Date : 1900-01-01 DOI:10.1109/IIRW.2016.7904907

E. Ceccarelli, C. Heffernan, J. Browne, P. Fitzgerald

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引用次数: 0

摘要

这项工作提出了adi公司专有的金属接触微机电系统(MEMS)开关技术的器件级可靠性(DLR)表征。描述了在按住和切换操作模式下的独立设备特性。另一种需要分析的操作模式是所谓的“热交换”。对开关的拉入电压和接触电阻进行了主要的物理参数分析。该DLR表征方法可被视为迈向标准的第一步，该标准将与典型产品资格认证并行执行，以评估设备的长期可靠性。

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Intrinsic reliability characterization for stand-alone MEMS switch technology

This work presents a device level reliability (DLR) characterization for the Analog Devices proprietary metal contact microelectromechanical systems (MEMS) switch technology. Stand-alone device characterizations in both hold-down and toggle operation modes are described. An alternative operation mode to analyze is the so called “hot switching”. The switch pull-in voltage and the contact resistance are the main physical parameters that have been analyzed. This DLR characterization methodology can be considered a first step towards a standard that will be performed in parallel to typical product qualifications in order to assess the device long term reliability.

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2016 IEEE International Integrated Reliability Workshop (IIRW)

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