{"title":"纳米机械振荡器的非线性动力学","authors":"S. Zaitsev, R. Almog, O. Shtempluck, E. Buks","doi":"10.1109/ICMENS.2005.88","DOIUrl":null,"url":null,"abstract":"In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. The beam is driven into nonlinear regime of oscillations and the response is measured by an electron beam displacement detector. In one set of experiments we study the impact of nonlinear damping on the dynamics in the bistable regime of operation. For data analysis we introduce a nonlinear damping term to Duffing equation. The experiment shows conclusively that accounting for nonlinear damping effects is needed for correct modeling of the dynamics. In another set of experiments we study intermodulation mechanical gain near the onset of bistability. As predicted by a theoretical analysis, we find high intermodulation gain when the system is operated close to a bifurcation.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Nonlinear dynamics in nanomechanical oscillators\",\"authors\":\"S. Zaitsev, R. Almog, O. Shtempluck, E. Buks\",\"doi\":\"10.1109/ICMENS.2005.88\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. The beam is driven into nonlinear regime of oscillations and the response is measured by an electron beam displacement detector. In one set of experiments we study the impact of nonlinear damping on the dynamics in the bistable regime of operation. For data analysis we introduce a nonlinear damping term to Duffing equation. The experiment shows conclusively that accounting for nonlinear damping effects is needed for correct modeling of the dynamics. In another set of experiments we study intermodulation mechanical gain near the onset of bistability. As predicted by a theoretical analysis, we find high intermodulation gain when the system is operated close to a bifurcation.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"76 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.88\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.88","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. The beam is driven into nonlinear regime of oscillations and the response is measured by an electron beam displacement detector. In one set of experiments we study the impact of nonlinear damping on the dynamics in the bistable regime of operation. For data analysis we introduce a nonlinear damping term to Duffing equation. The experiment shows conclusively that accounting for nonlinear damping effects is needed for correct modeling of the dynamics. In another set of experiments we study intermodulation mechanical gain near the onset of bistability. As predicted by a theoretical analysis, we find high intermodulation gain when the system is operated close to a bifurcation.