单片CMOS-SAW振荡器的研制

IEEE Ultrasonics Symposium, 2005. Pub Date : 2005-09-18 DOI:10.1109/ULTSYM.2005.1603318

M. Furuhata, A. Yajima, K. Goto, H. Sato, T. Funasaka, S. Kawano, S. Fujii, T. Higuchi, M. Ueno, T. Karaki, M. Adachi

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引用次数: 8

摘要

近年来，移动通信系统的小型化和高精度已成为发展的必然要求。由于具有良好的相位噪声性能，SAW时钟已成为数据传输的可行选择。然而，声表面波振荡器通常由声表面波器件和CMOS-IC分别组成，这种大尺寸限制了其在移动通信系统中的使用。本文介绍了用ZnO薄膜沉积在CMOS-IC上的最小单片SAW振荡器的研制。SAW器件和集成电路已合并为一个单元，总厚度几乎与集成电路相同。

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Development of monolithic CMOS-SAW oscillator

In recent years, miniaturization and high accuracy of mobile communication systems have become essential. Because of good phase noise performance, the SAW clock has become a viable option for data transmission. However, a SAW oscillator is usually made up of a SAW device and a CMOS-IC separately, and this large size limits its use in mobile communication systems. This paper covers the development of the smallest monolithic SAW oscillator using thin film ZnO deposited on a CMOS-IC. The SAW device and the IC have been combined into a single unit, and the total thickness is nearly the same as the IC.

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IEEE Ultrasonics Symposium, 2005.

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