{"title":"表面微机械悬浮式MEMS扬声器","authors":"Antoine Verreault, Paul-Vahé Cicek, A. Robichaud","doi":"10.1109/NEWCAS52662.2022.9842083","DOIUrl":null,"url":null,"abstract":"This paper presents the design and simulation of a levitating MEMS speaker. The device is composed of a levitating membrane actuated through electrostatic forces using several electrodes and a control system. The absence of supporting anchors allows for a drastic reduction of damping losses and therefore promises higher power efficiency. Simulation results indicate very promising performance.","PeriodicalId":198335,"journal":{"name":"2022 20th IEEE Interregional NEWCAS Conference (NEWCAS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A Surface-Micromachined Levitating MEMS Speaker\",\"authors\":\"Antoine Verreault, Paul-Vahé Cicek, A. Robichaud\",\"doi\":\"10.1109/NEWCAS52662.2022.9842083\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the design and simulation of a levitating MEMS speaker. The device is composed of a levitating membrane actuated through electrostatic forces using several electrodes and a control system. The absence of supporting anchors allows for a drastic reduction of damping losses and therefore promises higher power efficiency. Simulation results indicate very promising performance.\",\"PeriodicalId\":198335,\"journal\":{\"name\":\"2022 20th IEEE Interregional NEWCAS Conference (NEWCAS)\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-06-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 20th IEEE Interregional NEWCAS Conference (NEWCAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEWCAS52662.2022.9842083\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 20th IEEE Interregional NEWCAS Conference (NEWCAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEWCAS52662.2022.9842083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents the design and simulation of a levitating MEMS speaker. The device is composed of a levitating membrane actuated through electrostatic forces using several electrodes and a control system. The absence of supporting anchors allows for a drastic reduction of damping losses and therefore promises higher power efficiency. Simulation results indicate very promising performance.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
