频率对高k MIM电容器可靠性的影响

2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI:10.1109/IRPS48203.2023.10117790

X. Federspiel, A. Griffon, Marios Barlas, P. Lamontagne

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引用次数: 0

摘要

高钾电容器中的介电弛豫现象已被报道引起短暂效应。我们在这里提出了一个TDDB分析，包括直流和脉冲直流应力施加在HK电容器。我们证明了频率对TDDB的显著影响。使用基于介电极化动力学的模型，我们发现TDDB随频率的变化规律很好地符合，并且在电压加速因子和活化能方面也具有一致的行为。

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Effect of Frequency on Reliability Of High-K MIM Capacitors

Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.

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2023 IEEE International Reliability Physics Symposium (IRPS)

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