具有同心倾斜固定梳状电极的两轴准静态无平衡微扫描仪

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051502

Seunghwan Moon, Jaekwon Lee, Yangkyu Park, Kwanghyun Kim, Sang-Jin Lee, Jong-Hyun Lee, Hyun-Duk Shin, Hwan-Sun Kim

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引用次数: 1

摘要

通过玻璃盖和固定梳状电极的微组装，制备了两轴准静态无平衡微扫描仪。在水平和垂直扫描轴上，总光学扫描角度分别扩大到5.2°和5.8°。

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Two-axis quasistatic gimbal-less microscanner with concentrically tilted stationary comb electrodes

Two-axis quasistatic gimbal-less microscanners were fabricated through the microassembly of a glass lid and stationary comb electrodes. The total optical scan angles were enlarged to 5.2° and 5.8° for horizontal and vertical scan axes, respectively.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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