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材料特性对微机械音叉陀螺仪共振频率的影响研究

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283440
M. Lobur, A. Holovatyy
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引用次数: 1

摘要

本文研究了材料性能对谐振频率的影响。说明了共振驱动和感应频率与材料特性的关系。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Research of Influence of Materials Properties on Resonance Frequencies of Micromechanical Tuning Fork Gyroscope
In this paper the influence of materials properties on resonance frequencies is researched. It is shown how resonance drive and sense frequencies depend on material property.
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2007 International Conference on Perspective Technologies and Methods in MEMS Design
2007 International Conference on Perspective Technologies and Methods in MEMS Design
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