围绕栅极MOSFET的应变诱导横向沟道工作函数解析模型

S. Sarkhel, N. Bagga
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引用次数: 0

摘要

在本文中,我们研究了双轴应变对线性梯度功函数工程(WFEG)环绕栅(SRG) MOSFET的影响。在松弛的SiGe缓冲层上伪晶沉积薄层硅,在硅通道中产生双轴应变,影响沉积硅膜的能带结构。这种调制减小了有效带隙并增强了电子亲和力,同时减小了电流载流子的有效质量,从而改善了器件特性。在通道区域求解著名的泊松方程,解析得到表面电位和阈值电压分布图。仿真结果也得到了验证。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analytical Model of a Strain Induced Lateral Channel Workfunction Engineered Surrounding Gate MOSFET
In this paper, we have investigated the impact of biaxial strain on a linearly graded work-function engineered (WFEG) surrounding gate (SRG) MOSFET. A pseudo-morphic deposition of thin layer silicon on a relaxed SiGe buffer develops a biaxial strain in the silicon channel which affects the band structures of the deposited silicon film. This modulation decreases the effective bandgap and enhances the electron affinity along with a net decrease in the effective masses of current carriers thereby improving the device characteristics. A well-known Poisson Equation is solved in the channel region to analytically acquire the surface potential and threshold voltage profile. The results are also been validated by TCAD simulations.
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