层中粒子散射的积分方程

E. Marx
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引用次数: 4

摘要

在诸如集成电路中的层对齐或在表面上应用涂层等应用中,我们可能需要确定由介电层中波长相当大小的介电或导电颗粒散射的光。我们应用单积分方程的方法来解决这个问题,并发现所需的最小未知表面场数取决于系统的几何构型。该方法包括在一个区域定义与物理场重合的辅助场,在各处服从相同的方程,服从辐射条件,并满足涉及跳跃的某些边界条件,这些跳跃是积分方程中的未知曲面函数。我们将这种方法应用于层中的粒子。我们发现,对于某些构型,未知数的数量超过了边界的数量。我们还估计了这样一个三维问题的内存需求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Integral equations for scattering by a particle in a layer
In applications such as the alignment of layers in an integrated circuit or the application of a coating to a surface we may need to determine the light scattered by a dielectric or conducting particle of size comparable to the wavelength in a dielectric layer. We apply the method of the single integral equation to solve this problem and find that the minimum number of required unknown surface fields depends on the geometrical configuration of the system. This method involves the definition of auxiliary fields that coincide with physical fields in one region, obey the same equations everywhere, obey the radiation condition, and satisfy certain boundary conditions involving jumps that are the unknown surface functions in the integral equations. We apply this method to particles in layers. We find that for certain configurations the number of unknowns exceeds the number of boundaries. We also estimate the memory requirements for such a three-dimensional problem.
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