Photoelectrical properties of TOS thin films based on TiO2 prepared by modified magnetron sputtering

In this work photoelectrical properties of the thin films based on TiO2 have been presented. Thin films were deposited by high energy (HE) magnetron sputtering process. The properties of thin films were modified by doping with Tb and Pd. Structural studies performed with X-ray diffraction measurements, have shown that after deposition rutile phase in TiO2:(Tb, Pd) thin films was received. The results also have shown that examined thin films were nanocrystalline. doping of TiO2-isulating matrix with selected Pd-Tb dopants results in enhanced electrical conductivity of prepared thin films, i.e. oxide-semiconductors with p-type of electrical conduction. Photoelectrical properties of TiO2:(Tb,Pd) thin films were examined by optical beam induced current method. The results of transient photovoltage response to optical excitation have shown that the photovoltage was generated at the active area of prepared TOS-Si heterojunction.