{"title":"RF-MEMS及其在微波系统、天线和无线通信中的应用","authors":"C. Christodoulou","doi":"10.1109/IMOC.2003.1244915","DOIUrl":null,"url":null,"abstract":"MEMS-based products combine both mechanical and electronic devices on a monolithic microchip to produce superior performance over solid-state components, especially for wireless applications. RF-MEMS components are mainly used as inductors, tunable capacitors, switches, in VCOs, and resonators. Popular MEMS switches for wireless applications include transmit/receive duplexers, band-mode selection, time delay for phased-array antennas, and reconfigurable antennas. This paper talks about the use of MEMS switches in conjunction of fractal antennas to achieve multi-frequency, reconfigurable antennas that can be used for a variety of communication applications and how micromachining can be used to fabricated new 3-D MEMS antenna structures for very high frequency applications.","PeriodicalId":156662,"journal":{"name":"Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"38","resultStr":"{\"title\":\"RF-MEMS and its applications to microwave systems, antennas and wireless communications\",\"authors\":\"C. Christodoulou\",\"doi\":\"10.1109/IMOC.2003.1244915\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS-based products combine both mechanical and electronic devices on a monolithic microchip to produce superior performance over solid-state components, especially for wireless applications. RF-MEMS components are mainly used as inductors, tunable capacitors, switches, in VCOs, and resonators. Popular MEMS switches for wireless applications include transmit/receive duplexers, band-mode selection, time delay for phased-array antennas, and reconfigurable antennas. This paper talks about the use of MEMS switches in conjunction of fractal antennas to achieve multi-frequency, reconfigurable antennas that can be used for a variety of communication applications and how micromachining can be used to fabricated new 3-D MEMS antenna structures for very high frequency applications.\",\"PeriodicalId\":156662,\"journal\":{\"name\":\"Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678)\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-11-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"38\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMOC.2003.1244915\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMOC.2003.1244915","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
RF-MEMS and its applications to microwave systems, antennas and wireless communications
MEMS-based products combine both mechanical and electronic devices on a monolithic microchip to produce superior performance over solid-state components, especially for wireless applications. RF-MEMS components are mainly used as inductors, tunable capacitors, switches, in VCOs, and resonators. Popular MEMS switches for wireless applications include transmit/receive duplexers, band-mode selection, time delay for phased-array antennas, and reconfigurable antennas. This paper talks about the use of MEMS switches in conjunction of fractal antennas to achieve multi-frequency, reconfigurable antennas that can be used for a variety of communication applications and how micromachining can be used to fabricated new 3-D MEMS antenna structures for very high frequency applications.