{"title":"SAW OFC应变传感器","authors":"M. Roller, D. Malocha, R. Vaidyanathan","doi":"10.1109/ULTSYM.2009.5441544","DOIUrl":null,"url":null,"abstract":"This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented.","PeriodicalId":368182,"journal":{"name":"2009 IEEE International Ultrasonics Symposium","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"SAW OFC strain sensor\",\"authors\":\"M. Roller, D. Malocha, R. Vaidyanathan\",\"doi\":\"10.1109/ULTSYM.2009.5441544\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented.\",\"PeriodicalId\":368182,\"journal\":{\"name\":\"2009 IEEE International Ultrasonics Symposium\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE International Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2009.5441544\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE International Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2009.5441544","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented.
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