栅极全能器件的局部热效应

C. Landon, Lei Jiang, D. Pantuso, I. Meric, K. Komeyli, J. Hicks, Daniel Schroeder
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引用次数: 1

摘要

栅极全能器件(GAA)继续着局部热约束增强和性能提高的技术趋势。我们描述了用于局部热分析和晶体管尺度温升数据收集的方法,并比较了GAA电池和Fin-FET电池的热阻。我们证明了GAA对器件温度的影响并不是通过适当的热管理实现全部技术优势的限制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Localized thermal effects in Gate-all-around devices
Gate-all-around (GAA) devices continue the technology trends of increased localized thermal confinement and higher performance. We describe the methodology used for localized thermal analysis and data collection of temperature rise on the transistor scale and compare GAA cell thermal resistance to Fin-FET cells. We demonstrate that the implications of GAA on device temperature are not a constraint to realizing the full technology benefits with proper thermal management.
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