Spindt阴极制备中剥离层的研究

IVESC 2012 Pub Date : 2012-04-24 DOI:10.1109/IVESC.2012.6264184

Xinghui Li, Guodong Bai, Hanyan Li, M. Ding, Jinjun Feng, Fujiang Liao

{"title":"Spindt阴极制备中剥离层的研究","authors":"Xinghui Li, Guodong Bai, Hanyan Li, M. Ding, Jinjun Feng, Fujiang Liao","doi":"10.1109/IVESC.2012.6264184","DOIUrl":null,"url":null,"abstract":"Some lift-off materials for Spindt cathode fabricating were investigated. Water-soluble materials such as sodium chloride and sodium carbonate make a very fast removing process but cause rough and irregular emitters. An etching technique for heated aluminum oxide lift-off film was suggested to obtain good cone emitters and easy etching process.","PeriodicalId":249267,"journal":{"name":"IVESC 2012","volume":"36 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of lift-off layer in Spindt cathode fabrication\",\"authors\":\"Xinghui Li, Guodong Bai, Hanyan Li, M. Ding, Jinjun Feng, Fujiang Liao\",\"doi\":\"10.1109/IVESC.2012.6264184\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Some lift-off materials for Spindt cathode fabricating were investigated. Water-soluble materials such as sodium chloride and sodium carbonate make a very fast removing process but cause rough and irregular emitters. An etching technique for heated aluminum oxide lift-off film was suggested to obtain good cone emitters and easy etching process.\",\"PeriodicalId\":249267,\"journal\":{\"name\":\"IVESC 2012\",\"volume\":\"36 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IVESC 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVESC.2012.6264184\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IVESC 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVESC.2012.6264184","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

研究了几种用于Spindt阴极制造的起飞材料。氯化钠和碳酸钠等水溶性物质的去除过程非常快，但会产生粗糙和不规则的排放物。提出了一种加热氧化铝剥离膜的蚀刻技术，以获得良好的锥形发射体和简单的蚀刻工艺。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Investigation of lift-off layer in Spindt cathode fabrication

Some lift-off materials for Spindt cathode fabricating were investigated. Water-soluble materials such as sodium chloride and sodium carbonate make a very fast removing process but cause rough and irregular emitters. An etching technique for heated aluminum oxide lift-off film was suggested to obtain good cone emitters and easy etching process.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

IVESC 2012

自引率

0.00%

发文量