精密定位系统及其在“智能晶圆厂”中的潜在应用

2018 International Symposium on Semiconductor Manufacturing (ISSM) Pub Date : 2018-12-01 DOI:10.1109/ISSM.2018.8651178

Chih Ming Chan

{"title":"精密定位系统及其在“智能晶圆厂”中的潜在应用","authors":"Chih Ming Chan","doi":"10.1109/ISSM.2018.8651178","DOIUrl":null,"url":null,"abstract":"In recent years, the “SMART Factory” concept is becoming common in the wafer fab industry. A truly “SMART Fab” has all the production systems connected and integrated real-time with automated material handling system to optimize all production resources. In this paper, the concept of adopting a precise positioning system in a wafer fab is being discussed. The functions of this positioning system and how it fits into the “SMART Fab” vision will be shared.","PeriodicalId":262428,"journal":{"name":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Precise Positioning System and Potential Application in a “SMART Fab”\",\"authors\":\"Chih Ming Chan\",\"doi\":\"10.1109/ISSM.2018.8651178\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In recent years, the “SMART Factory” concept is becoming common in the wafer fab industry. A truly “SMART Fab” has all the production systems connected and integrated real-time with automated material handling system to optimize all production resources. In this paper, the concept of adopting a precise positioning system in a wafer fab is being discussed. The functions of this positioning system and how it fits into the “SMART Fab” vision will be shared.\",\"PeriodicalId\":262428,\"journal\":{\"name\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"30 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2018.8651178\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2018.8651178","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

近年来，“智能工厂”的概念在晶圆制造行业越来越普遍。一个真正的“SMART Fab”将所有生产系统与自动化物料处理系统实时连接和集成，以优化所有生产资源。本文讨论了在晶圆厂中采用精确定位系统的概念。将分享该定位系统的功能以及它如何适应“SMART Fab”愿景。

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Precise Positioning System and Potential Application in a “SMART Fab”

In recent years, the “SMART Factory” concept is becoming common in the wafer fab industry. A truly “SMART Fab” has all the production systems connected and integrated real-time with automated material handling system to optimize all production resources. In this paper, the concept of adopting a precise positioning system in a wafer fab is being discussed. The functions of this positioning system and how it fits into the “SMART Fab” vision will be shared.

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2018 International Symposium on Semiconductor Manufacturing (ISSM)

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