全嵌入式板级光互连和光电子印刷电路板的制造

C.C. Chang, C.J. Chang, J. Lau, Allison Chang, T. Tang, S. Chiang, Maurice Lee, T. Tseng, T. Wei, L. L. Shiah, Yap Guan Jie, C. Teo, J. Chai
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引用次数: 5

摘要

本文介绍了一种嵌入式板级聚合物波导和垂直光通道互连的光电印刷电路板的制造工艺。光电封装包含一个垂直腔面发射激光器(VCSEL),一个光电探测器(PD),表面贴装技术(SMT)组件和一个全嵌入式板级光互连。第一步是制造一个带有两个45度反射镜的聚合物波导结构,然后用两个预浸料将波导嵌入中心,通过两步层压工艺在印刷电路板内部形成水平光通道。垂直光通道由三步工艺制成,共形掩模成型,激光烧蚀和铜蚀刻。这个垂直通道连接到水平波导的镜面上。宽、准直的光束与封装板通过窄、长的气隙耦合,在SMT过程中提供了很大的偏差容错能力。本文将讨论关键的工艺步骤,并给出x射线图像。此外,本文还讨论了重要的电学和光学参数的表征测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of fully embedded board-level optical interconnects and optoelectronic printed circuit boards
The manufacturing processes of an optoelectronic printed circuit board (OEPCB) with an embedded board-level polymeric waveguide and vertical-optical channel interconnection are presented in this paper. The optoelectronic packages contain one vertical cavity surface emitting laser (VCSEL), one photo detector (PD), surface mount technology (SMT) components and one fully embedded board-level optical interconnects. The first step is to fabricate a polymeric waveguide structure with two 45-degree mirrors, and then embedded the waveguide in the center with two prepreg to form a horizontal optical channel inside a printing circuit board by a two-step laminating process. The vertical-optical channel is made by a three-step process, conformal mask forming, laser ablating and copper etching. This vertical channel is connected to the mirror of the horizontal waveguide. A wide, collimated optical beam couples a package board across a narrow, long air gap and provides a large tolerance to misalignment during the SMT process. Key process steps will be discussed and X-ray images will be presented in this paper. Also, characterization measurements of the important electrical and optical parameters are discussed in this paper.
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