Qing-Hao Hu, Wensheng Zhao, Gaofeng Wang, Dawei Wang
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Potential Applicability of Single-Walled Carbon Nanotube Through-Silicon Vias for Differential Signal Transmission
Circuit model for vertically aligned carbon nanotube (CNT) array-filled differential through-silicon vias (DTSVs) is presented and investigated. The frequency-dependent impedance is extracted by using partial-element equivalent-circuit (PEEC) method. Based on the circuit model, the electrical performance of the proposed D-TSVs is investigated.