Low-k interconnect stack with a novel self-aligned via patterning process for 32nm high volume manufacturing

Interconnect process features are described for a 32nm high performance logic technology. Lower-k, yet highly manufacturable, Carbon-Doped Oxide (CDO) dielectric layers are introduced on this technology at three layers to address the demand for ever lower metal line capacitance. The pitches have been aggressively scaled to meet the expectation for density, and the metal resistance and electromigration performance have been carefully balanced to meet the high reliability requirements while maintaining the lowest possible resistance. A new patterning scheme has been used to limit any patterning damage to the lower-k ILD and address the increasingly difficult problem of via-to-metal shorting at these very tight pitches. The interconnect stack has a thick Metal-9 layer to provide a low resistance path for the power and I/O routing that has been carefully scaled to maintain a low resistance. The combined interconnect stack provides high density, performance, and reliability, and supports a Pb-free 32nm process.