改进了InAs/AlSb hfet的电荷控制和频率性能

C. Bolognesi, E. Caine, H. Kraemer
{"title":"改进了InAs/AlSb hfet的电荷控制和频率性能","authors":"C. Bolognesi, E. Caine, H. Kraemer","doi":"10.1109/DRC.1993.1009631","DOIUrl":null,"url":null,"abstract":"Micron-sized InAs/AISb-based heterostructure field-effect transistors (HFETs) generally suffer from a large increase in drain (output) conductance gm that is thought to be related to impact ionization across the small energy gap of the lnAs channel for large drain-to-source biases VDS. The large gDs was found to limit both the frequency performance, and the useful operational range of sub-micron devices to drain biases VDs < 0.4-0.5 V.l In the present paper, we show how the well thickness and the buffer layers influence the charge control properties of InAs/AISb HFETs, and how the kink can be eliminated from the drain characteristics of micron-sized HFETs, resulting in low output conductances and well-behaved drain characteristics. We also demonstrate that a proper buffer layer structure is most beneficial in sub-micron devices, and results in great improvements in operational range and frequency performance. First, we show that an increase in quantization energy, achieved by reducing the InAS well thickness, is not sufficient to eliminate the kink from the device characteristics: InAdAISb HFETs exhibit a kink for well thicknesses ranging from 15 to 7.5 nm. Though narrower wells can be grown, the dominance of interface roughness scattering in narrower wells2 makes them less attractive for high-speed HFET applications. Next, we demonstrate that the kink effect is intimately related to the composition and growth conditions used for the AI,Ga,-Sb buffer layers grown immediately below the device active region to provide a chemically stable mesa floor: with proper alloy compositions and growth conditions, InAdAISb HFETs are essentially kink free, and exhibit output conductances as low as 25 mS/mm (see Fig. 1). We also demonstrate how the addition of donors to the buffer layers can be used to further drastically alter the charge control in the InAs/AISb HFET and yield still lower output conductances. Our observations appear to link the kink effect to the holes generated during impact ionization near the drain end of the gate. Finally, we show that the improvement in buffer layers benefits sub-micron devices as well: cut-off frequencies fT as high as 70 GHz (extrapolated from 40 GHz at -6 dB/oct) were obtained in 0.5 pm devices that can be operated at drain voltages as high as VDs = 1.3 V. The improved charge control results in a nearly doubled f, (for a 17% reduction in gate length) when compared to our previous results.’ This work was supported by the ONR.","PeriodicalId":310841,"journal":{"name":"51st Annual Device Research Conference","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improved charge control and frequency performance in InAs/AlSb HFETs\",\"authors\":\"C. Bolognesi, E. Caine, H. Kraemer\",\"doi\":\"10.1109/DRC.1993.1009631\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Micron-sized InAs/AISb-based heterostructure field-effect transistors (HFETs) generally suffer from a large increase in drain (output) conductance gm that is thought to be related to impact ionization across the small energy gap of the lnAs channel for large drain-to-source biases VDS. The large gDs was found to limit both the frequency performance, and the useful operational range of sub-micron devices to drain biases VDs < 0.4-0.5 V.l In the present paper, we show how the well thickness and the buffer layers influence the charge control properties of InAs/AISb HFETs, and how the kink can be eliminated from the drain characteristics of micron-sized HFETs, resulting in low output conductances and well-behaved drain characteristics. We also demonstrate that a proper buffer layer structure is most beneficial in sub-micron devices, and results in great improvements in operational range and frequency performance. First, we show that an increase in quantization energy, achieved by reducing the InAS well thickness, is not sufficient to eliminate the kink from the device characteristics: InAdAISb HFETs exhibit a kink for well thicknesses ranging from 15 to 7.5 nm. Though narrower wells can be grown, the dominance of interface roughness scattering in narrower wells2 makes them less attractive for high-speed HFET applications. Next, we demonstrate that the kink effect is intimately related to the composition and growth conditions used for the AI,Ga,-Sb buffer layers grown immediately below the device active region to provide a chemically stable mesa floor: with proper alloy compositions and growth conditions, InAdAISb HFETs are essentially kink free, and exhibit output conductances as low as 25 mS/mm (see Fig. 1). We also demonstrate how the addition of donors to the buffer layers can be used to further drastically alter the charge control in the InAs/AISb HFET and yield still lower output conductances. Our observations appear to link the kink effect to the holes generated during impact ionization near the drain end of the gate. Finally, we show that the improvement in buffer layers benefits sub-micron devices as well: cut-off frequencies fT as high as 70 GHz (extrapolated from 40 GHz at -6 dB/oct) were obtained in 0.5 pm devices that can be operated at drain voltages as high as VDs = 1.3 V. The improved charge control results in a nearly doubled f, (for a 17% reduction in gate length) when compared to our previous results.’ This work was supported by the ONR.\",\"PeriodicalId\":310841,\"journal\":{\"name\":\"51st Annual Device Research Conference\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"51st Annual Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DRC.1993.1009631\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"51st Annual Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.1993.1009631","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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摘要

微米尺寸的InAs/ aisb基异质结构场效应晶体管(hfet)通常会遭受漏极(输出)电导gm的大幅增加,这被认为与大漏极-源偏置VDS中lnAs通道小能量间隙的冲击电离有关。在本文中,我们展示了井厚和缓冲层如何影响InAs/AISb hfet的电荷控制特性,以及如何从微米级hfet的漏极特性中消除结结,从而获得低输出电导和良好的漏极特性。我们还证明了适当的缓冲层结构在亚微米器件中是最有利的,并且可以大大改善工作范围和频率性能。首先,我们表明,通过减小InAS井厚来实现的量化能量的增加并不足以消除器件特性中的扭结:InAdAISb hfet在井厚范围为15至7.5 nm时表现出扭结。虽然可以生长更窄的井,但在更窄的井中,界面粗糙度散射的优势使其对高速HFET应用的吸引力降低。接下来,我们证明了扭结效应与AI,Ga,-Sb缓冲层的组成和生长条件密切相关,这些缓冲层生长在器件活性区域下方,以提供化学稳定的台面。在适当的合金成分和生长条件下,InAdAISb HFET基本上是无结的,输出电导低至25 mS/mm(见图1)。我们还展示了如何在缓冲层中添加供体来进一步彻底改变InAs/AISb HFET中的电荷控制,并产生更低的输出电导。我们的观察似乎将扭结效应与栅极漏端附近撞击电离过程中产生的空洞联系起来。最后,我们证明了缓冲层的改进也有利于亚微米器件:在0.5 pm器件中获得了高达70 GHz的截止频率fT(在-6 dB/oct时从40 GHz推断),可以在高达VDs = 1.3 V的漏极电压下工作。与我们之前的结果相比,改进的电荷控制结果几乎增加了一倍的f(栅极长度减少了17%)。这项工作得到了ONR的支持。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improved charge control and frequency performance in InAs/AlSb HFETs
Micron-sized InAs/AISb-based heterostructure field-effect transistors (HFETs) generally suffer from a large increase in drain (output) conductance gm that is thought to be related to impact ionization across the small energy gap of the lnAs channel for large drain-to-source biases VDS. The large gDs was found to limit both the frequency performance, and the useful operational range of sub-micron devices to drain biases VDs < 0.4-0.5 V.l In the present paper, we show how the well thickness and the buffer layers influence the charge control properties of InAs/AISb HFETs, and how the kink can be eliminated from the drain characteristics of micron-sized HFETs, resulting in low output conductances and well-behaved drain characteristics. We also demonstrate that a proper buffer layer structure is most beneficial in sub-micron devices, and results in great improvements in operational range and frequency performance. First, we show that an increase in quantization energy, achieved by reducing the InAS well thickness, is not sufficient to eliminate the kink from the device characteristics: InAdAISb HFETs exhibit a kink for well thicknesses ranging from 15 to 7.5 nm. Though narrower wells can be grown, the dominance of interface roughness scattering in narrower wells2 makes them less attractive for high-speed HFET applications. Next, we demonstrate that the kink effect is intimately related to the composition and growth conditions used for the AI,Ga,-Sb buffer layers grown immediately below the device active region to provide a chemically stable mesa floor: with proper alloy compositions and growth conditions, InAdAISb HFETs are essentially kink free, and exhibit output conductances as low as 25 mS/mm (see Fig. 1). We also demonstrate how the addition of donors to the buffer layers can be used to further drastically alter the charge control in the InAs/AISb HFET and yield still lower output conductances. Our observations appear to link the kink effect to the holes generated during impact ionization near the drain end of the gate. Finally, we show that the improvement in buffer layers benefits sub-micron devices as well: cut-off frequencies fT as high as 70 GHz (extrapolated from 40 GHz at -6 dB/oct) were obtained in 0.5 pm devices that can be operated at drain voltages as high as VDs = 1.3 V. The improved charge control results in a nearly doubled f, (for a 17% reduction in gate length) when compared to our previous results.’ This work was supported by the ONR.
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