Y. Shibata, N. Kuze, M. Matsui, K. Kaya, M. Kanai, T. Kawai
{"title":"脉冲激光沉积LiNbO/sub - 3/和LiTaO/sub - 3/薄膜的SAW性能","authors":"Y. Shibata, N. Kuze, M. Matsui, K. Kaya, M. Kanai, T. Kawai","doi":"10.1109/FREQ.1996.559835","DOIUrl":null,"url":null,"abstract":"LiNbO/sub 3/ and LiTaO/sub 3/ films are deposited on sapphire and AlN/sapphire substrates using Ar-F excimer laser ablation. The deposition and structure of the films are investigated systematically. The structure of the films is analyzed by X-ray pole figure, high-resolution X-ray diffraction and transmission electron microscopy. The results of these analysis indicate that deposited films are extremely high-quality epitaxial films. As-grown LiNbO/sub 3/ and LiTaO/sub 3/ films are sufficiently piezoelectric to fabricate SAW devices. The experimental data of SAW velocity (Vs) and electromechanical coupling coefficients (k/sup 2/) almost coincide with the calculated data.","PeriodicalId":140391,"journal":{"name":"Proceedings of 1996 IEEE International Frequency Control Symposium","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"SAW properties of LiNbO/sub 3/ and LiTaO/sub 3/ films grown by pulsed laser deposition\",\"authors\":\"Y. Shibata, N. Kuze, M. Matsui, K. Kaya, M. Kanai, T. Kawai\",\"doi\":\"10.1109/FREQ.1996.559835\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"LiNbO/sub 3/ and LiTaO/sub 3/ films are deposited on sapphire and AlN/sapphire substrates using Ar-F excimer laser ablation. The deposition and structure of the films are investigated systematically. The structure of the films is analyzed by X-ray pole figure, high-resolution X-ray diffraction and transmission electron microscopy. The results of these analysis indicate that deposited films are extremely high-quality epitaxial films. As-grown LiNbO/sub 3/ and LiTaO/sub 3/ films are sufficiently piezoelectric to fabricate SAW devices. The experimental data of SAW velocity (Vs) and electromechanical coupling coefficients (k/sup 2/) almost coincide with the calculated data.\",\"PeriodicalId\":140391,\"journal\":{\"name\":\"Proceedings of 1996 IEEE International Frequency Control Symposium\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-06-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1996 IEEE International Frequency Control Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.1996.559835\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1996 IEEE International Frequency Control Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.1996.559835","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
SAW properties of LiNbO/sub 3/ and LiTaO/sub 3/ films grown by pulsed laser deposition
LiNbO/sub 3/ and LiTaO/sub 3/ films are deposited on sapphire and AlN/sapphire substrates using Ar-F excimer laser ablation. The deposition and structure of the films are investigated systematically. The structure of the films is analyzed by X-ray pole figure, high-resolution X-ray diffraction and transmission electron microscopy. The results of these analysis indicate that deposited films are extremely high-quality epitaxial films. As-grown LiNbO/sub 3/ and LiTaO/sub 3/ films are sufficiently piezoelectric to fabricate SAW devices. The experimental data of SAW velocity (Vs) and electromechanical coupling coefficients (k/sup 2/) almost coincide with the calculated data.
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