带耗散的ZnO薄膜的厚度剪切振动

2016 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2016-05-09 DOI:10.1109/FCS.2016.7546735

Jianke Du, Xian Fu, J. Lou, Bin Huang, Ji Wang

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引用次数: 1

摘要

研究了考虑黏度效应的ZnO薄膜的厚度剪切振动。开尔文模式用来描述材料的粘度。基于三维压电理论，得到了ZnO薄膜的控制方程。给出了计算结果，并进行了详细的讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Thickness shear vibration of ZnO thin film with dissipation

Thickness shear vibration of ZnO thin film with consideration of viscosity effects is investigated. The Kelvin mode is used to describe the viscosity of the materials. Based on the three-dimensional piezoelectric theory, the governing equations of ZnO thin film are obtained. The calculation results are presented and discussed in detail.

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2016 IEEE International Frequency Control Symposium (IFCS)

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