用于芯片实验室应用的压电微泵

2009 International Conference on Microelectronics - ICM Pub Date : 2009-12-19 DOI:10.1109/ICM.2009.5418596

J. G. Rocha, V. Cardoso, V. Correia, S. Mendez, G. Minas

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引用次数: 5

摘要

本文介绍了一种片上泵送系统及其驱动电路。该系统可用于芯片实验室，在微通道中泵送流体。该装置由两个放置在一起的芯片组成:一个带有电子元件的CMOS芯片和一个带有微通道和泵送系统的玻璃芯片。本文的主要研究对象是基于压电聚合物作动器的泵送系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Piezoelectric micropump for lab-on-a-chip applications

This paper describes an on-chip pumping system and the correspondent driving circuit. The system can be used in lab-on-a-chip applications for pumping the fluids in the microchannels. The device is constituted by two chips placed together: a CMOS chip with the electronics and a glass chip, with the microchannels and the pumping system. This pumping system, wich is the main subject of the article is based on piezoelectric polymer actuators.

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2009 International Conference on Microelectronics - ICM

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