改进gaa - nw - tfet模拟器件性能的实验证明

C. Schulte-Braucks, S. Richter, L. Knoll, L. Selmi, Qing-Tai Zhao, S. Mantl
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引用次数: 9

摘要

我们提供了p型平面和栅极周围(GAA)纳米线(NW)隧道场效应管(tfet)模拟器件性能的实验数据。10 nm直径的gaa - nw - tfet的最大跨导效率为12.7V-1,与模拟结果接近。从平面tfet到直径为20 nm和10 nm的gaa - nw - tfet,通过增强静电性能,模拟性能得到了显著改善。在Vgt = Vd = -1 V的栅极超速驱动下,gaa - nw - tfet的最大跨导率为122 μ s /μm,导通电流高达23 μ A/μm。此外,观察到良好的输出电流饱和导致高达217的高固有增益,甚至高于20 nm finfet。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental demonstration of improved analog device performance in GAA-NW-TFETs
We present experimental data on analog device performance of p-type planar and gate all around (GAA) nanowire (NW) Tunnel-FETs (TFETs). 10 nm diameter GAA-NW-TFETs reach a maximum transconductance efficiency of 12.7V-1 which is close to values obtained from simulations. A significant improvement of the analog performance by enhancing the electrostatics from planar TFETs to GAA-NW-TFETs with diameter of 20 nm and 10 nm is demonstrated. A maximum transconductance of 122 μS/μm and on-current up to 23 μ A/μm at a gate overdrive of Vgt = Vd = -1 V were achieved for the GAA-NW-TFETs. Furthermore a good output current-saturation is observed leading to high intrinsic gain up to 217 which is even higher than in 20 nm FinFETs.
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