利用电化学微加工技术在印刷电路板上制造微型混频器

J. Singh, S. Bhattacharya
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引用次数: 3

摘要

摘要电化学微加工(ECMM)主要用于精度要求高、最终零件形状复杂以及表面完整性和性能与加工工艺无关的情况。在这项工作中,已经演示了以下内容:工作的第一部分演示了ECMM的实验设置,该实验设置用于使用尖端直径为150 μ m的单点电化学加工工具在印刷电路板(PCB)基板上制造微型混频器。该方法能够显示出一种有前途的制造路线,其中PCB基板上的线路可以以高产量和处理速度印刷。文章第二部分指出,可以利用单点刀具通过电化学工艺对PCB基板进行加工,可以加工最小特征尺寸为243µm,精细公差为0.025µm,粗糙度为3.0459µm~7.2404µm。文章的第三部分报告了一个相对复杂的几何形状的微型混合器的几何参数,该参数是通过基于COMSOL的仿真平台得到的,该仿真平台是使用上述制造工艺制造的。通过实验设计进一步验证了该工艺,并通过荧光显微镜评估了流体在制备结构上的流动和混合行为。与微铣削相比,该技术的优势在于实现了整体较小的特征尺寸,避免了光刻驱动工艺的复杂性,从而产生了对设备依赖性低得多的工艺,与光刻驱动技术相比,对环境无害,总体成本低。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of micro-mixer on printed circuit board using electrochemical micromachining
Abstract Electrochemical micromachining (ECMM) has been mostly carried out in situations demanding precision, complexity in the shapes of final components and in case the surface integrity and performance are independent of the machining process. In this work, the following have been demonstrated: The first part of the work demonstrates the experimental setup for ECMM that is used to fabricate a micro-mixer on a printed circuit board (PCB) substrate by using a single point electrochemical machining tool with a tip diameter—150 µm. The method is able to show a promising route of fabrication where the circuit lines on a PCB substrate can be printed with high yield and processing speeds. The second part of the article points out that machining can be carried out on PCB substrates through electrochemical processes using a single point tool and a minimum feature size of 243 µm can be machined with a fine tolerance of 0.025 µm and roughness = 3.0459 µm~7.2404 µm. The third part of the article reports the geometrical parameters of a relatively complex geometry of a micro-mixer which is arrived at through a COMSOL based simulation platform that is fabricated using the mentioned manufacturing process. The process is further validated through the design of experiments, and fluid flow and mixing behaviour on the fabricated structure is evaluated through an epifluorescence microscope. The advantages that this technique may offer is in terms of achieving an overall low feature size in comparison to micro-milling and avoiding the complexities of lithography-driven processes to produce a process which has a much lower equipment dependency, is environmentally benign in comparison to the lithography driven techniques and is overall low in cost.
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