基于MEMS技术的热电发电机的制造与测试

2018 7th Electronic System-Integration Technology Conference (ESTC) Pub Date : 2018-09-01 DOI:10.1109/ESTC.2018.8546445

A. Korotkov, V. Loboda, S. Dzyubanenko, E. Bakulin

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引用次数: 10

摘要

本文讨论了用于低功耗应用的热电发电机(TEG)，例如高温物体监测系统。TEG的工作原理是基于塞贝克效应。提出了制备TEG的工艺流程，并给出了输出比功率为0.3 ~ 6.2 μW/sq的测试结果。描述了25 - 100k温度范围内的mm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication and Testing of MEMS Technology Based Thermoelectric Generator

The article deals with thermoelectric generators (TEG) to be designed for low-power applications, e.g. high temperature object monitoring systems. TEG operating principle is based on the Seebeck effect. The proposed technological process of TEG fabrication and testing results with the output specific power of 0.3–6.2 μW/sq.mm at the temperature range of 25–100 K are described.

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2018 7th Electronic System-Integration Technology Conference (ESTC)

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