Feasibility study of aperiodic backreflectors for thin film Si solar cells with focused ion beam lithography

Recently, great efforts have been carried out to design optimized metallic nano-grating back-reflectors to improve the light absorption in thin film solar cells. In this paper, is introduced a feasibility study on the prototyping of patterned substrate for solar cell fabrication. In particular, is demonstrated that the Focused Ion Beam lithography not affect the electric performances of the realized cell, giving us the opportunity to use this lithography technique for prototyping each kind of substrate for solar cell fabrication.