使用3omega和热反射方法表征热阻抗的双重方法

2020 International Workshop on Integrated Nonlinear Microwave and Millimetre-Wave Circuits (INMMiC) Pub Date : 2020-07-01 DOI:10.1109/INMMiC46721.2020.9160092

A. Jakani, R. Sommet, J. Nallatamby, C. Charbonniaud

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引用次数: 0

摘要

为了全面表征5μm宽、500μm长微加热器样品的热阻抗ZTH，采用了两种不同的方法。本文提出的第一种测量方法是使用热反射(TR)技术进行的。第二次使用3 ω方法进行。所有测量都确保在107°C/W左右提取相同的RTH。此外，还进行了三维有限元仿真来验证测量方法。最后，本文给出了在UMS铸造厂生产的8x50μm的GaN hemtft的第一个TR结果。

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Dual Approach for the characterization of the thermal impedance using 3omega and thermoreflectance methods

Two different methods were performed in order to fully characterize the thermal impedance ZTH of a micro heater sample of 5μm wide and 500μm length. The first measurement method proposed in this work was carried out using the Thermo Reflectance (TR) technique. The second one was performed using the 3 ω method. All the measurements ensure the extraction of the same RTH around 107°C/W. Moreover, a 3D finite elements simulation has been performed to validate the measurement approach. Finally, first TR results for a GaN HEMTof 8x50μm from UMS foundry are given in this paper.

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2020 International Workshop on Integrated Nonlinear Microwave and Millimetre-Wave Circuits (INMMiC)

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