水热法制备高整合度侧壁ZnO纳米棒

14th IEEE International Conference on Nanotechnology Pub Date : 2014-12-01 DOI:10.1109/NANO.2014.6968006

Yuzhong Lin, Hao-Yu Wu, Yu-Wen Cheng, Ching-Fuh Lin

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引用次数: 0

摘要

采用水热法在蚀刻硅上制备了高整合度侧壁ZnO纳米棒。温度固定在摄氏90度。用扫描电镜观察了ZnO纳米棒的形貌。结果表明，我们成功地在凹槽的侧壁上旋转涂覆了ZnO种子层。此外，ZnO纳米棒生长在蚀刻硅衬底的凹槽中。

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High conformity sidewall ZnO nanorods via hydrothermal method

High conformity sidewall ZnO nanorods are manufactured on etched Si by hydrothermal method. The temperature is fixed at 90 degree Celsius. The morphology of ZnO nanorods is examined by scanning electron microscopy. Also, the results show that we successfully spin coat ZnO seed layer on the sidewalls of grooves. Moreover, ZnO nanorods are grown in grooves of etched Si substrate.

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14th IEEE International Conference on Nanotechnology

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